ASML 4022.476.01533
Part No.: 4022.476.01533
Manufacturer: ASML (Netherlands)
Series: 4022 (Control & Electronic Boards)
Type: PCB / Power Supply Module
Application: Lithography Wafer Steppers (e.g., Twinscan, PAS)
1. General Description
4022.476.01533 is a proprietary printed circuit board (PCB) / power interface module designed for ASML semiconductor lithography systems (primarily DUV/Twinscan series). It belongs to the 4022 family (control/electronics) and serves as a critical power distribution or signal conditioning card for precision subsystems.
Note: Full public datasheets are restricted (ASML proprietary). This is a legacy industrial spare, widely sourced as refurbished/new surplus.
Note: Full public datasheets are restricted (ASML proprietary). This is a legacy industrial spare, widely sourced as refurbished/new surplus.
2. Series & Family Context
• 4022.476.xxxx: Power / Interface PCB group (similar to NP-0581 4022.476.01212)
• Form Factor: VME / Eurocard (standard for ASML control racks)
• Usage: Mounted in system control cabinets
• Status: Legacy (obsolete production, active spare demand)
3. Typical Specifications (Inferred from Family)
• Power Input: 24 VDC / 5V (backplane)
• Output: Regulated auxiliary power / signal relays
• Connectors: DIN 41612 / ribbon headers
• Protection: Over-voltage / over-current / ESD
• Temp Range: -10°C to +60°C
• Weight: ~0.4–0.7 kg
4. Common Applications
Used in ASML wafer steppers/scanners for:
- Control cabinet power distribution
- Stage / sensor interface signaling
- Subsystem power management
- Emergency stop / interlock circuits
- Precision metrology loop support
ASML © Proprietary Industrial Spare
